The Universal Capacitive Readout™ IC (MS3110) is Irvine Sensors programmable, sensor ASIC designed specifically for testing MEMs devices. The MS3110 is well-suited for MEMs device characterization and evaluation and is used by many research laboratories. The MS3110 senses change in capacitance between two capacitors and provides an output voltage proportional to that change with a resolution down to 3.0aF, capable of the most demanding applications.
The MS3110 is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply and some decoupling components. No additional components are required.
MEMS sensors (such as accelerometers, rate sensors, and other sensors that can be modeled as variable capacitors) require a readout electronic interface that can sense small changes in capacitance. The MS3110 is capable of sensing capacitance changes down to 4.0 aF/rtHz, typical.
The MS3110 interfaces to either a differential capacitor pair or a single capacitive sensor. A high-level voltage output signal that is linear with full range of sense capacitance is provided. The MS3110 also includes an on-chip capacitive DAC (up to 10pF) for initial differential adjustments and/or for quasi- differential operation with a dummy capacitor. The MS3110 has provisions for trimming the gain and output offset. Bandwidth is also user programmable. An on-chip EEPROM is provided to store trim and program settings.
The MS3110 Evaluation Board provides a platform for testing and programming the UCR device. An on-board SOIC socket allows the MS3110 to be programmed and configured by a connected PC through a USB interface. A Graphical User Interface (GUI) provides full access to all the MS3110 registers and automates the programming task. Contact our distributor for purchasing information.