The Universal Capacitive Readout™ IC (MS3110) is Irvine Sensors programmable, sensor ASIC designed specifically for testing MEMs devices. The MS3110 is well-suited for MEMs device characterization and evaluation and is used by many research laboratories. The MS3110 senses change in capacitance between two capacitors and provides an output voltage proportional to that change with a resolution down to 3.0aF, capable of the most demanding applications.

  • 4.0aF/√ Hz  resolution
  • Single or differential input
  • 0.5 to 8kHz programmable bandwidth
  • 2.25V reference with external output
  • 5.0V supply
  • Internal EEPROM
  • Available in SOIC-16 or bare die

The MS3110 is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply and some decoupling components. No additional components are required.

MEMS sensors (such as accelerometers, rate sensors, and other sensors that can be modeled as variable capacitors) require a readout electronic interface that can sense small changes in capacitance. The MS3110 is capable of sensing capacitance changes down to 4.0 aF/rtHz, typical.

The MS3110 interfaces to either a differential capacitor pair or a single capacitive sensor. A high-level voltage output signal that is linear with full range of sense capacitance is provided. The MS3110 also includes an on-chip capacitive DAC (up to 10pF) for initial differential adjustments and/or for quasi- differential operation with a dummy capacitor. The MS3110 has provisions for trimming the gain and output offset. Bandwidth is also user programmable. An on-chip EEPROM is provided to store trim and program settings.


The MS3110 is well suited for interfacing to a wide variety of MEMs devices as well as other applications, such as:

  • Accelerometers
  • Pressure Sensors
  • Rate Sensors
  • Motion Sensors
  • Fluid Sensors
  • Gas Sensors
  • Touch Sensors

MS3110 Customer Application Gallery

The following are examples of MS3110 applications. All work and images are property of their respective owners.

Hair-Like Sensor Image

Hair-Like Shear Sensor

Shuangqin Liu, Tufts University

Cochlear Properties and Micromachined Hair-like Shear Sensors

Translation Stage image

Translation Stage

Bonjin Koo, University of Illinois at Urbana-Champaign

A 2 Degree-of-Freedom SOI-MEMs Translation Stage with Cloased Loop Positioning

Accelerometer Image


Peng Qu and Hongwei Qu, Sensors (Basel) 2013 May; 13(5): 5720–5736.

Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology

Pollution Detector Image

Pollution Detector

Zhichun Wang, Zengja Wang, Jianhang Wang, Wentao Li, College of Information and Engineering, Inner Mongolia University of Science and Technology

Lubricating Oil Pollution Detection Sensor Design

Pressure Sensor Image

Pressure Sensor

Sung-Pil Chang and Mark G. Allen, Journal of Micromechanics and Microengineering, February 2004; 14, pp612-618

Capacitive pressure sensors with stainless steel diaphragm and substrate

Pollution Detector Image


Srinidhi Veeravalli Murali, Thesis, University of Akron, 2008

A Microfluidic Coulter Counting Device for Metal Wear Detection in Lubrication Oil

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Evaluation Board

The MS3110 Evaluation Board provides a platform for testing and programming the UCR device. An on-board SOIC socket allows the MS3110 to be programmed and configured by a connected PC through a USB interface. A Graphical User Interface (GUI) provides full access to all the MS3110 registers and automates the programming task. Contact our distributor for purchasing information.

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First Choice Components
Jay Etesham
First Choice Components
18242 Mc Durmott W. Suite D.
Irvine, CA 92614
Phone: 949-660-1616
Fax: 949-660-1625
Toll Free: 1-877-660-1616